Memoirs of the Faculty of Engineering, Okayama University
Published by Faculty of Enginerring, Okayama University

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Memoirs of the School of Engineering, Okayama University

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Scribing of Ceramie Circuit Board with Q-Switched Nd:YAG Laser

Uno, Yoshiyuki Department of Mechanical Engineering
Kubota, Shin-ichiro Industrial Technology Center of Okayama Prefecture
Yokomizo, Seiichi Industrial Technology Center of Okayama Prefecture
Ogata, Kojiro Hitachi Construction Machinery Co., Ltd
Tada, Nobuhiko Hitachi Construction Machinery Co., Ltd
抄録
Scribing of copper coated alumina ceramic board with Q-switched YAG laser used for the maskless direct patterning of circuit board is experimentally investigated, which leads to efficient production of trial circuit board. Better dividing of alumina circuit board 655μm in thickness can be attained by the scribing of about 100μm depth. Higher repetition frequency of laser irradiation leads to smaller notch angle and lower breaking load.
ISSN
0475-0071
NCID
AA10699856