Memoirs of the Faculty of Engineering, Okayama University
Published by Faculty of Enginerring, Okayama University

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Memoirs of the School of Engineering, Okayama University

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Scribing of Ceramie Circuit Board with Q-Switched Nd:YAG Laser

Uno, Yoshiyuki
Kubota, Shin-ichiro
Yokomizo, Seiichi
Ogata, Kojiro
Tada, Nobuhiko
Scribing of copper coated alumina ceramic board with Q-switched YAG laser used for the maskless direct patterning of circuit board is experimentally investigated, which leads to efficient production of trial circuit board. Better dividing of alumina circuit board 655μm in thickness can be attained by the scribing of about 100μm depth. Higher repetition frequency of laser irradiation leads to smaller notch angle and lower breaking load.