A 2-MHz 6-kVA voltage-source inverter using low-profile MOSFET modules for low-temperature plasma generators

<p>This paper presents a 2-MHz 6-kVA voltage-source inverter for low-temperature plasma generators. A new MOSFET module referred to as a “mega pack” is specially designed and fabricated for high-frequency high-power applications. It has a low-profile package equipped with four terminal plates. The main circuit consists of a single-phase full-bridge inverter using the four new modules. The layout of the modules is characterized by two modules, which are placed back-to-back with each other, forming a half bridge. Both device and circuit designs achieve great reduction of stray inductance in the main circuit. A prototype inverter shows stable operation around frequencies as high as 2 MHz.</p>

Digital Object Identifier: 10.1109/63.803394
Published with permission from the copyright holder.this is the institute's copy, as published in Power Electronics, IEEE Transactions on, Nov. 1999, Volume 14, Issue 6, Page(s):1014-1020.
Publisher URL:http://dx.doi.org/10.1109/63.803394
Copyright © 1999 IEEE. All rights reserved.