Study of preload mechanism for small piezoelectric transducers with hollow structure for cryogenic environments

In various industrial fields, cryogenic fluids such as liquid hydrogen and liquid nitrogen are increasingly used as fuels and refrigerants. To control the flow rate of those fluids, valves that can be operated in cryogenic environments are needed. In general, the miniaturization of the valve can be achieved by using a piezoelectric ceramic as an actuator to drive the mechanism. Additionally, the properties degradation can be suppressed by applying a preload to the piezoelectric ceramic. To miniaturize the piezoelectric actuator applying preload at low temperature conditions, we use differences in thermal expansion coefficients to apply preload to the piezoelectric ceramics. In this study, we have designed and fabricated a small piezoelectric transducer with a hollow structure for cryogenic environments by using this proposed structure. To evaluate the fabricated transducer, we have measured vibration velocity and estimated the acceleration in cryogenic environments.

This is an Accepted Manuscript of an article published by IOP Publishing.

This fulltext file will be available in Apr. 2027.