Memoirs of the Faculty of Engineering, Okayama University 29巻 1号
1994-11-30 発行
Uno, Yoshiyuki
Department of Mechanical Engineering
Kubota, Shin-ichiro
Industrial Technology Center of Okayama Prefecture
Yokomizo, Seiichi
Industrial Technology Center of Okayama Prefecture
Ogata, Kojiro
Hitachi Construction Machinery Co., Ltd
Tada, Nobuhiko
Hitachi Construction Machinery Co., Ltd
Scribing of copper coated alumina ceramic board with Q-switched YAG laser used for the maskless direct patterning of circuit board is experimentally investigated, which leads to efficient production of trial circuit board. Better dividing of alumina circuit board 655μm in thickness can be attained by the scribing of about 100μm depth. Higher repetition frequency of laser irradiation leads to smaller notch angle and lower breaking load.