Fabrication and characterization of a submillimeter-scale ultrasonic motor

Submillimeter-scale electrically driven micromotors have the potential to revolutionize micro-robotic systems, but difficulties in their fabrication processes and unknown physical phenomena prevent their development. In this paper, we propose a submillimeter-scale rotary piezoelectric ultrasonic motor with the smallest stator (0.41 mm × 0.41 mm × 0.25 mm) reported to date. The micromachining technologies enable the creation of tiny components. A micromanipulator that can control a small amount of adhesive of sub-milligram order engenders success in manufacture of the stator. Several experiments clarify the submillimeter-scale physical behaviors, such as the admittance and the quality factor. With appropriate piezoelectric materials, submillimeter-scale ultrasonic motors are built and characterized using a rotor with 0.15 mm diameter. The motor with typical hard PZTs demonstrated maximum torque of 5.4 nNm and a maximum angular velocity of 714 rad/s at an applied voltage with amplitude of 44.8 Vp-p. Furthermore, another motor with single-crystal PMN-PT piezoelectric elements presented the possibility of low-voltage actuation. These submillimeter-scale ultrasonic motors were compared with existing comparable-size micromotors.

© 2023 Elsevier B.V. This manuscript version is made available under the CC-BY-NC-ND 4.0 license https://creativecommons.org/licenses/by-nc-nd/4.0/

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