| ID | 34077 |
| FullText URL | |
| Author |
Fujita, Hideaki
Akagi, Hirofumi
Shinohara, Shinichi
|
| Abstract | This paper presents a 2 MHz 6 kVA voltage-source inverter for low-temperature plasma generators. A new MOSFET module referred to as a “mega pack” is specially designed and fabricated for high-frequency high-power applications. It has a low-profile package equipped with four terminal plates. The main circuit consists of a single-phase full-bridge inverter using the four new modules. The layout of the modules is characterized by two modules, which are placed back-to-back with each other, forming a half bridge. Both device and circuit designs achieve great reduction of stray inductance in the main circuit. A prototype inverter shows stable operation around frequencies as high as 2 MHz |
| Keywords | bridge circuits
inductance
invertors
plasma devices
plasma
production
power MOSFET
|
| Note | Digital Object Identifier: 10.1109/63.803394
Published with permission from the copyright holder. This is the institute's copy, as published in Power Electronics, IEEE Transactions on, November 1999, Volume 14, Issue 6, Pages 1014-1020. Publisher URL:http://dx.doi.org/10.1109/63.803394 Copyright © 1999 IEEE. All rights reserved. |
| Published Date | 1999-11
|
| Publication Title |
Power Electronics
|
| Volume | volume14
|
| Issue | issue6
|
| Start Page | 1014
|
| End Page | 1020
|
| Content Type |
Journal Article
|
| language |
English
|
| Refereed |
True
|
| DOI | |
| Submission Path | electrical_engineering/16
|
