start-ver=1.4
cd-journal=joma
no-vol=42
cd-vols=
no-issue=2
article-no=
start-page=292
end-page=294
dt-received=
dt-revised=
dt-accepted=
dt-pub-year=2006
dt-pub=20062
dt-online=
en-article=
kn-article=
en-subject=
kn-subject=
en-title=
kn-title=Improvement of zone control induction heating equipment for high-speed processing of semiconductor devices
en-subtitle=
kn-subtitle=
en-abstract=
kn-abstract=<p>In order to process a semiconductor device of high quality, uniform heating is necessary, but it is not easy to heat uniformly with conventional induction heating equipment. To solve this problem, zone control induction heating equipment has been jointly developed. In this paper, we examine the effect of dividing an induction heater into several small coil groups having different current and frequency, using the finite-element method. We describe the heating characteristics of the zone control coil groups and show that nearly uniform heating is possible by controlling both current and frequency.</p>
en-copyright=
kn-copyright=

en-aut-name=MiyagiDaisuke
en-aut-sei=Miyagi
en-aut-mei=Daisuke
kn-aut-name=
kn-aut-sei=
kn-aut-mei=
aut-affil-num=1
ORCID=

en-aut-name=SaitouAisya
en-aut-sei=Saitou
en-aut-mei=Aisya
kn-aut-name=
kn-aut-sei=
kn-aut-mei=
aut-affil-num=2
ORCID=

en-aut-name=TakahashiNorio
en-aut-sei=Takahashi
en-aut-mei=Norio
kn-aut-name=
kn-aut-sei=
kn-aut-mei=
aut-affil-num=3
ORCID=

en-aut-name=UchidaNaoki
en-aut-sei=Uchida
en-aut-mei=Naoki
kn-aut-name=
kn-aut-sei=
kn-aut-mei=
aut-affil-num=4
ORCID=

en-aut-name=OzakiKazuhiro
en-aut-sei=Ozaki
en-aut-mei=Kazuhiro
kn-aut-name=
kn-aut-sei=
kn-aut-mei=
aut-affil-num=5
ORCID=

affil-num=1
en-affil=
kn-affil=Okayama University

affil-num=2
en-affil=
kn-affil=Okayama University

affil-num=3
en-affil=
kn-affil=Okayama University

affil-num=4
en-affil=
kn-affil=Mitsui Engineering & Shipbuilding Company Limited

affil-num=5
en-affil=
kn-affil=Mitsui Engineering & Shipbuilding Company, Limited
en-keyword=Induction heating
kn-keyword=Induction heating
en-keyword=uniform heating
kn-keyword=uniform heating
en-keyword=zone control
kn-keyword=zone control
END