タイトル(別表記) Large-scale vortical structure detection using microphone array in a semiconductor single wafer spin cleaner
フルテキストURL TransJSME_83_845_2017.pdf
著者 河内 俊憲| 三好 勇輝| 中野 裕介| 永田 靖典| 柳瀬 眞一郎|
抄録 Fluctuating pressure (p’ ) of a large-scale vortical structure generated in a semiconductor single wafer spin cleaner was detected by using microphone array. Twelve microphones were installed on the exhaust cover under the rotating disk of the cleaner with their interval of 7.5° or 15°. Power spectrum densities (PSD) of p’ were compared with those of fluctuating velocity measured by PIV for various rotation angular velocities to identify fluctuations due to convection of the large-scale vortical structure. Good agreement of PSDs indicates that the large-scale structure could be detected by using microphone. Cross-correlation of p’ measured at different positions revealed that the large-scale structure convected to the downstream in the rotational direction of the disk. The convection speed was about 12 % of the angular velocity of the rotating disk. Number of the vortex in the large-scale structure was also evaluated from the time-series p’ data. Time-space contour map was made for p’ based on the data measured at the different angular position, and showed periodical swept strip patterns. Presences of the strip patterns indicate the pressure disturbances were stably convected to the downstream. From this time-space map, two-dimensional Fourier transform efficiently extracted the number of vortices in the large-scale structure.
キーワード Rotating disk Flow stability Coherent structure Differential pressure measurement
発行日 2017
出版物タイトル 日本機械学会論文集
83巻
845号
出版者 日本機械学会
開始ページ 16-00441
ISSN 00290270
NCID AN00187419
資料タイプ 学術雑誌論文
言語 Japanese
OAI-PMH Set 岡山大学
著作権者 © 2016 The Japan Society of Mechanical Engineers
論文のバージョン author
NAID 130005303917
DOI 10.1299/transjsme.16-00441
関連URL isVersionOf https://doi.org/10.1299/transjsme.16-00441
タイトル(別表記) Periodical structure of vortices in a semiconductor single wafer spin cleaner
フルテキストURL TransJSME_81_829_2015.pdf
著者 河内 俊憲| 福田 修也| 中野 裕介| 清水 義也| 永田 靖典| 柳瀬 眞一郎|
抄録 We experimentally and numerically investigated large-scale structures formed by vortices in a single wafer spin cleaner. The Q-criterion identified the vortices developed in the cleaner as the flow regions with positive second invariant of the velocity gradient tensor obtained by both the PIV and LES. The time-series two-components PIV data shows that small-vortices were clustered near and under the edge of the rotating disk and were periodically emanated from there to the housing wall of the cleaner. The emanation frequency was increased with increasing in the angular velocity of the rotating disk. Three-dimensional LES reveal that six longitudinal vortices were spirally developed from under the edge of the rotating disk to the housing wall. This structure stably rotated slower than the disk speed. Fourier analysis of the LES data agreed with that of the PIV data. This supports that the passages of the stable spiral vortices on the PIV measurement region resulted in the periodical emanation of the clustered small-vortices observed in the PIV. Such a very large-scale spiral structure will induce reattachment of contaminants on the wafer surface, and should be destructed for development of much higher efficient cleaner.
キーワード Rotating disk Flow stability Large-scale structure PIV LES
発行日 2015
出版物タイトル 日本機械学会論文集
81巻
829号
出版者 日本機械学会
開始ページ 15-00273
ISSN 00290270
NCID AN00187419
資料タイプ 学術雑誌論文
言語 Japanese
OAI-PMH Set 岡山大学
著作権者 © 2015 The Japan Society of Mechanical Engineers
論文のバージョン author
DOI 10.1299/transjsme.15-00273
関連URL isVersionOf https://doi.org/10.1299/transjsme.15-00273
タイトル(別表記) OpenFOAM analysis of air-entraining and submerged vortices in pump sump
フルテキストURL TransJSME_83_853_2017.pdf
著者 山崎 諒| 河内 俊憲| 永田 靖典| 柳瀬 眞一郎|
キーワード CFD VOF Turbulance model Grid convergence Vortex detection scheme
発行日 2017
出版物タイトル 日本機械学会論文集
83巻
853号
出版者 日本機械学会
開始ページ 17-00181
ISSN 00290270
NCID AN00187419
資料タイプ 学術雑誌論文
言語 English
OAI-PMH Set 岡山大学
著作権者 © 2017 The Japan Society of Mechanical Engineers
論文のバージョン author
DOI 10.1299/transjsme.17-00181
関連URL isVersionOf https://doi.org/10.1299/transjsme.17-00181