JaLCDOI 10.18926/15503
FullText URL Mem_Fac_Eng_OU_25_2_9.pdf
Author Mikuni, Masato| Hida, Moritaka| Nishida, Norihide| Sakakibara, Akira| Yamada, Masuo|
Abstract Strains induced in the Si substrates by TiN film were observed with X-ray topography. The image of the sample with TiN film 0.45μm thick was like that of a dislocation loop observed with transmission electron microscope. The images of the samples with TiN films 1.65, and 1.9μm thick were different; blackening spreaded in the <112> and <110> direction from the ring contrast in shape of four-lobed rosette pattern. Spreading extended 1.6 times longer than the radius of the ring contrast along the <112> direction. The strain field extended 0.1μm in depth from the top surface where TiN was plated. From the topographs of bent Si beam, it was found that the blackness was almost proportional to the strain. The strains induced by TiN film locally ion-plated were smaller than those observed previously when TiN was ion-plated on the whole top surface of the substrate. Fine structures were observed in the topographs which could not be explained by the kinematical theory.
Publication Title Memoirs of the Faculty of Engineering, Okayama University
Published Date 1991-03-28
Volume volume25
Issue issue2
Start Page 9
End Page 15
ISSN 0475-0071
language 英語
File Version publisher
NAID 120002307429
Author Totsuji, Hiroo| Kishimoto, Tokunari| Totsuji, Chieko|
Published Date 1996-03-29
Publication Title Memoirs of the Faculty of Engineering, Okayama University
Volume volume30
Issue issue2
Content Type Departmental Bulletin Paper
Author Faculty of Engineering, Okayama University|
Published Date 2001-12
Publication Title Memoirs of the Faculty of Engineering, Okayama University
Volume volume36
Issue issue1
Content Type Others
Author Faculty of Engineering, Okayama University|
Published Date 2004-03
Publication Title Memoirs of the Faculty of Engineering, Okayama University
Volume volume38
Issue issue1-2
Content Type Others
Author Faculty of Engineering, Okayama University|
Published Date 2002-11
Publication Title Memoirs of the Faculty of Engineering, Okayama University
Volume volume37
Issue issue1
Content Type Others
Author Faculty of Engineering, Okayama University|
Published Date 2003-03
Publication Title Memoirs of the Faculty of Engineering, Okayama University
Volume volume37
Issue issue2
Content Type Others
Author Faculty of Engineering, Okayama University|
Published Date 2002-03
Publication Title Memoirs of the Faculty of Engineering, Okayama University
Volume volume36
Issue issue2
Content Type Others
Author Faculty of Engineering, Okayama University|
Published Date 2003-03
Publication Title Memoirs of the Faculty of Engineering, Okayama University
Volume volume37
Issue issue2
Content Type Others
Author Faculty of Engineering, Okayama University|
Published Date 2004-03
Publication Title Memoirs of the Faculty of Engineering, Okayama University
Volume volume38
Issue issue1-2
Content Type Others
Author Faculty of Engineering, Okayama University|
Published Date 2001-12
Publication Title Memoirs of the Faculty of Engineering, Okayama University
Volume volume36
Issue issue1
Content Type Others
Author Faculty of Engineering, Okayama University|
Published Date 2002-03
Publication Title Memoirs of the Faculty of Engineering, Okayama University
Volume volume36
Issue issue2
Content Type Others
Author Faculty of Engineering, Okayama University|
Published Date 2002-11
Publication Title Memoirs of the Faculty of Engineering, Okayama University
Volume volume37
Issue issue1
Content Type Others