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In this paper, the effect of dividing into several small coil groups having different current and frequency on heating characteristics is investigated using FEM (finite element method). The heating characteristics of graphite of each coil is examined, and a useful information for controlling current and frequency, which realize the nearly uniform heating, is obtained.
electric current control
finite element analysis
semiconductor device manufacture
Digital Object Identifier: 10.1109/TMAG.2005.860823
Published with permission from the copyright holder. This is the institute's copy, as published in Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International, April 2005, Pages 1069-1070.
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