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ID 30229
FullText URL
Author
Miyagi, Daisuke
Saitoh, Aisya
Takahashi, N.
Uchida, N.
Ozaki, Kazuhiro
Abstract

In this paper, the effect of dividing into several small coil groups having different current and frequency on heating characteristics is investigated using FEM (finite element method). The heating characteristics of graphite of each coil is examined, and a useful information for controlling current and frequency, which realize the nearly uniform heating, is obtained.

Keywords
coils
electric current control
finite element analysis
frequency control
graphite
induction heating
semiconductor device manufacture
Note
Digital Object Identifier: 10.1109/TMAG.2005.860823
Published with permission from the copyright holder. This is the institute's copy, as published in Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International, April 2005, Pages 1069-1070.
Publisher URL:http://ieeexplore.ieee.org/search/wrapper.jsp?arnumber=1463964
Copyright © 2005 IEEE. All rights reserved.
Published Date
2005-4
Publication Title
Magnetics Conference
Start Page
1069
End Page
1070
Content Type
Journal Article
language
英語
Refereed
True
Submission Path
electricity_and_magnetism/21