| ID | 30229 |
| FullText URL | |
| Author |
Miyagi, Daisuke
Saitoh, Aisya
Takahashi, N.
Uchida, N.
Ozaki, Kazuhiro
|
| Abstract | In this paper, the effect of dividing into several small coil groups having different current and frequency on heating characteristics is investigated using FEM (finite element method). The heating characteristics of graphite of each coil is examined, and a useful information for controlling current and frequency, which realize the nearly uniform heating, is obtained. |
| Keywords | coils
electric current control
finite element analysis
frequency control
graphite
induction heating
semiconductor device manufacture
|
| Note | Digital Object Identifier: 10.1109/TMAG.2005.860823
Published with permission from the copyright holder. This is the institute's copy, as published in Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International, April 2005, Pages 1069-1070. Publisher URL:http://ieeexplore.ieee.org/search/wrapper.jsp?arnumber=1463964 Copyright © 2005 IEEE. All rights reserved. |
| Published Date | 2005-4
|
| Publication Title |
Magnetics Conference
|
| Start Page | 1069
|
| End Page | 1070
|
| Content Type |
Journal Article
|
| language |
英語
|
| Refereed |
True
|
| Submission Path | electricity_and_magnetism/21
|
