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A high-speed measuring system of multiple points is becoming an important issue in many industrial applications. Therefore, the development of a high-speed position sensor is an important issue. However, conventional sensors such as CCD(charge-coupled device) and PSD(position-sensitive detector) are insufficient to apply to the high-speed measurement of multiple points. We propose a new position sensor for high-speed measurement of multiple points. The proposed sensor features a single scanning detecting method of multiple points by parallel processing technique and design of the sensor by analog circuitry, which makes high-speed measurement of multiple points possible. The designed sensor system realizes both high-speed performance and high accuracy
analogue integrated circuits
electric sensing devices
Digital Object Identifier: 10.1109/IMTC.1996.507461
Published with permission from the copyright holder. This is the institute's copy, as published in Instrumentation and Measurement Technology Conference, 1996. IMTC-96. Conference Proceedings. 'Quality Measurements: The Indispensable Bridge between Theory and Reality'., IEEE, 1996, volume 1, Pages 642 - 647.
Copyright © 1996 IEEE. All rights reserved.
Instrumentation and Measurement Technology Conference