Title Alternative Large-scale vortical structure detection using microphone array in a semiconductor single wafer spin cleaner
FullText URL TransJSME_83_845_2017.pdf
Author KOUCHI, Toshinori| MIYOSHI, Yuki| NAKANO, Yusuke| NAGATA, Yasunori| YANASE, Shinichiro|
Keywords Rotating disk Flow stability Coherent structure Differential pressure measurement
Published Date 2017
Publication Title Transactions of the JSME
Volume volume83
Issue issue845
Publisher 日本機械学会
Start Page 16-00441
ISSN 00290270
NCID AN00187419
Content Type Journal Article
language 日本語
OAI-PMH Set 岡山大学
Copyright Holders © 2016 The Japan Society of Mechanical Engineers
File Version author
NAID 130005303917
DOI 10.1299/transjsme.16-00441
Related Url isVersionOf https://doi.org/10.1299/transjsme.16-00441